RUSSIAN MICROELECTRONICS
Vols. 29-47. Moscow; Heidelberg, 2000-2018. Reprint.
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ISSN 1063-7397
- RUSSIAN MICROELECTRONICS publishes research in such areas as methods and materials of purification, physical principles for creating components in large systems, techological principles of component and functional integration, and methods of producing ideal materials in small amounts and thin layers.
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